Dissolved Ozone Destruct Unit Introduced

IN USA Corp (USA), a global specialist in industrial instrumentation and ozone equipment, announces the launch of the SOD-O3 Dissolved Ozone Destruct Unit for point-of-use ozone abatement. “Ozone is being used ever more widely as a green and efficient gas in several wet processes in the Semiconductor industry; it also finds multiple effective applications in many other industries including Photovoltaic and Solar, Pharmaceuticals, and Food processing,” Ben Battat, VP, states.

“Since most facility drainage systems are not ozone compatible, it is important to make sure that the residual ozone in the effluents from processing equipment is abated properly,” he adds. “Our Model SOD-O3 is a dissolved ozone destruct system based on state-of-the-art UV technology.”

The SOD-O3 is used in multiple industries and applications. In the Semiconductor processing and PV (Photovoltaic, Solar) industries, Ozone is used for wafer surface preparation, photoresist stripping, removal of organic impurities, and removal of metallic contaminants. In other industries it is used for disinfection, water recycling and pilot studies.

The SOD-03 is typically integrated on the outlet of any wet processing equipment using ozone. It is used for point of use abatement of residual ozone in the effluents prior to discharging them down the facility drainage system. When the effluent passes through the SOD-O3, the built-in state of the art UV emitter irradiates the residual ozone in the effluent and decomposes it down to a level well below 1 mg/l. By abating the residual ozone in the effluent solution prior to discharging it down the drain, thus helping extend the life of the drainage system as well as ensuring compliance with EHS guidelines. The SOD-O3 is configured in a very easy to install stainless steel housing. The UV emitters inside the unit are well protected with Quartz sleeves that are capable of resisting even the harshest chemicals that could possibly be present in the effluent stream. The SOD-O3 is also equipped with Kalrez type seals, assuring its ability to handle all levels of ozone. A key advantage of the SOD-O3 is that it does not require any maintenance other than replacing periodically the quartz sleeves, thereby keeping the cost of ownership to a minimum.